Non-contact measuring microscopes for dimensional and depth measurement. Review the CA-MS series with XYZ measurement, split-target focus indication and configurable viewing heads and stages.

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CA-MS Series Non-Contact XYZ Measuring Microscopes

This microscope system offers a precise focus indicator consisting of an index graticule (Target Mark) and a beam-splitting prism built into the reflecting illumination optical system of the microscope. And it has been designed based on the optical principle that at just focus status, of which the upper and lower halves coincide, can be observed above the focused image of a specimen, and that when defocused even slightly, the index line is split into two lines in the upper and lower halves of the graticule.  

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CA-AWL046-068 Wafer Inspection System

The CA-AWL046-068 is a wafer inspection system for optical inspection in semiconductor processing. The product information covers the system configuration and image-analysis software. Review the specification table and contact Western Optronics to confirm the configuration for the required wafer inspection task.